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분야 | ISO/TC 209 : Cleanrooms and associated controlled environments |
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적용범위 | ISO 14644-9:2012 establishes the classification of cleanliness levels on solid surfaces by particle concentration in cleanrooms and associated controlled environment applications. Recommendations on testing and measuring methods, as well as information about surface characteristics are also given ISO 14644-9:2012 applies to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, working environments, tools, equipment and products. The surface particle cleanliness (SPC) classification is limited to particles between 0,05 µm and 500 µm. The following issues are not considered:
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국제분류(ICS)코드 | 13.040.35 : 클린룸 및 관련 제어 환경 |
페이지수 | 26 |
Edition | 1 |
No. | 표준번호 | 표준명 | 발행일 | 상태 |
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1 | ISO 14644-9:2022 | Cleanrooms and associated controlled environments — Part 9: Assessment of surface cleanliness for particle concentration | 2022-05-09 | 표준 |
2 | ISO 14644-9:2012 | Cleanrooms and associated controlled environments — Part 9: Classification of surface cleanliness by particle concentration | 2012-08-08 | 구판 |
ISO/DIS 14644-5 - Cleanrooms and associated controlled environments — Part 5: Operations 상세보기
ISO 14644-5:2004 - Cleanrooms and associated controlled environments — Part 5: Operations 상세보기
ISO 14644-7:2004 - Cleanrooms and associated controlled environments — Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments) 상세보기
ISO 14644-6:2007 - Cleanrooms and associated controlled environments — Part 6: Vocabulary 상세보기
ISO 14644-2:2015 - Cleanrooms and associated controlled environments — Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration 상세보기
ISO 14644-8:2013 - Cleanrooms and associated controlled environments — Part 8: Classification of air cleanliness by chemical concentration (ACC) 상세보기
ISO 14644-4:2001 - Cleanrooms and associated controlled environments — Part 4: Design, construction and start-up 상세보기
ISO 14644-5:2004 - Cleanrooms and associated controlled environments — Part 5: Operations 상세보기
ISO 14644-7:2004 - Cleanrooms and associated controlled environments — Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments) 상세보기
ISO 14644-10:2013 - Cleanrooms and associated controlled environments — Part 10: Classification of surface cleanliness by chemical concentration 상세보기
IEC TS 63134:2020 - Active assisted living (AAL) use cases 상세보기
IEC 60034-5:2020 RLV - Rotating electrical machines - Part 5: Degrees of protection provided by the integral design of rotating electrical machines (IP code) - Classification 상세보기
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