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Cleanrooms and associated controlled environments — Part 10: Classification of surface cleanliness by chemical concentration
| 분야 | ISO/TC 209 : Cleanrooms and associated controlled environments |
|---|---|
| 적용범위 | ISO 14644-10:2012 defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). It is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, working environment, tools, equipment and devices. |
| 국제분류(ICS)코드 | 13.040.35 : 클린룸 및 관련 제어 환경 |
| 페이지수 | 30 |
| Edition | 1 |
| No. | 표준번호 | 표준명 | 발행일 | 상태 |
|---|---|---|---|---|
| 1 | ISO 14644-10:2022 | Cleanrooms and associated controlled environments — Part 10: Assessment of surface cleanliness for chemical contamination | 2022-05-04 | 표준 |
| 2 | ISO 14644-10:2013 | Cleanrooms and associated controlled environments — Part 10: Classification of surface cleanliness by chemical concentration | 2013-03-01 | 구판 |
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ISO 14644-5:2004 - Cleanrooms and associated controlled environments — Part 5: Operations 상세보기
ISO 14644-7:2004 - Cleanrooms and associated controlled environments — Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments) 상세보기
ISO 14644-6:2007 - Cleanrooms and associated controlled environments — Part 6: Vocabulary 상세보기
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ISO 14644-14:2016 - Cleanrooms and associated controlled environments — Part 14: Assessment of suitability for use of equipment by airborne particle concentration 상세보기
ISO 14644-13:2017 - Cleanrooms and associated controlled environments — Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications 상세보기
ISO 14644-15:2017 - Cleanrooms and associated controlled environments — Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration 상세보기
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