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Cleanrooms and associated controlled environments — Part 8: Assessment of air cleanliness by chemical concentration (ACC)
| 분야 | ISO/TC 209 : Cleanrooms and associated controlled environments |
|---|---|
| 적용범위 | This document establishes typical assessment processes to determine grading levels of air chemical cleanliness (ACC) in cleanrooms and associated controlled environments, in terms of airborne concentrations of specific chemical substances (individual, group or category), and provides a protocol to include test methods, analysis and time-weighted factors for their determination. This document currently considers only concentrations of air chemical contaminants between 100 g/m3 and 10−12 g/m3 under cleanroom operational conditions. This document is not relevant for application in those industries, processes or productions where the presence of airborne chemical substances is not considered a risk to the product or process. It is not the intention of this document to describe the nature of air chemical contaminants. This document does not give a classification of surface chemical contamination. |
| 국제분류(ICS)코드 | 13.040.35 : 클린룸 및 관련 제어 환경 |
| 페이지수 | 22 |
| Edition | 3 |
| No. | 표준번호 | 표준명 | 발행일 | 상태 |
|---|---|---|---|---|
| 1 | ISO 14644-8:2022 | Cleanrooms and associated controlled environments — Part 8: Assessment of air cleanliness by chemical concentration (ACC) | 2022-06-21 | 표준 |
| 2 | ISO 14644-8:2013 | Cleanrooms and associated controlled environments — Part 8: Classification of air cleanliness by chemical concentration (ACC) | 2013-02-18 | 구판 |
| 3 | ISO 14644-8:2006 | Cleanrooms and associated controlled environments — Part 8: Classification of airborne molecular contamination | 2006-08-10 | 구판 |
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ISO 14644-7:2004 - Cleanrooms and associated controlled environments — Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments) 상세보기
ISO 14644-6:2007 - Cleanrooms and associated controlled environments — Part 6: Vocabulary 상세보기
ISO 14644-2:2015 - Cleanrooms and associated controlled environments — Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration 상세보기
ISO 14644-4:2022 - Cleanrooms and associated controlled environments — Part 4: Design, construction and start-up 상세보기
ISO 14644-9:2022 - Cleanrooms and associated controlled environments — Part 9: Assessment of surface cleanliness for particle concentration 상세보기
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