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분야 | ISO/TC 209 : Cleanrooms and associated controlled environments |
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적용범위 | ISO 14644-8:2013 establishes the classification of air chemical cleanliness (ACC) in cleanrooms and associated controlled environments, in terms of airborne concentrations of specific chemical substances (individual, group or category) and provides a protocol to include test methods, analysis and time-weighted factors within the specification for classification. ISO 14644-8:2013 currently considers only concentrations of air chemical contaminants between 100 and 10−12 g/m3 under cleanroom operational conditions. ISO 14644-8:2013 is not relevant for application in those industries, processes or productions where the presence of airborne chemical substances is not considered a risk to the product or process. It is not the intention of ISO 14644-8:2013 to describe the nature of air chemical contaminants. ISO 14644-8:2013 does not give a classification of surface chemical contamination. |
국제분류(ICS)코드 | 13.040.35 : 클린룸 및 관련 제어 환경 |
페이지수 | 22 |
Edition | 2 |
No. | 표준번호 | 표준명 | 발행일 | 상태 |
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1 | ISO 14644-8:2022 | Cleanrooms and associated controlled environments — Part 8: Assessment of air cleanliness by chemical concentration (ACC) | 2022-06-21 | 표준 |
2 | ISO 14644-8:2013 | Cleanrooms and associated controlled environments — Part 8: Classification of air cleanliness by chemical concentration (ACC) | 2013-02-18 | 구판 |
3 | ISO 14644-8:2006 | Cleanrooms and associated controlled environments — Part 8: Classification of airborne molecular contamination | 2006-08-10 | 구판 |
ISO/DIS 14644-5 - Cleanrooms and associated controlled environments — Part 5: Operations 상세보기
ISO 14644-5:2004 - Cleanrooms and associated controlled environments — Part 5: Operations 상세보기
ISO 14644-7:2004 - Cleanrooms and associated controlled environments — Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments) 상세보기
ISO 14644-6:2007 - Cleanrooms and associated controlled environments — Part 6: Vocabulary 상세보기
ISO 14644-2:2015 - Cleanrooms and associated controlled environments — Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration 상세보기
ISO 14644-9:2012 - Cleanrooms and associated controlled environments — Part 9: Classification of surface cleanliness by particle concentration 상세보기
ISO 14644-5:2004 - Cleanrooms and associated controlled environments — Part 5: Operations 상세보기
ISO 14644-4:2001 - Cleanrooms and associated controlled environments — Part 4: Design, construction and start-up 상세보기
ISO 14644-7:2004 - Cleanrooms and associated controlled environments — Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments) 상세보기
ISO 14644-2:2015 - Cleanrooms and associated controlled environments — Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration 상세보기
IEC TS 63134:2020 - Active assisted living (AAL) use cases 상세보기
IEC 60034-5:2020 RLV - Rotating electrical machines - Part 5: Degrees of protection provided by the integral design of rotating electrical machines (IP code) - Classification 상세보기
KS B ISO TS 25740-1 - 에스컬레이터 및 무빙워크에 대한 안전요건 — 제1부: 세계공통 필수 안전요건(GESRs) 상세보기
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KS C IEC TS 62872 - 산업 시설과 스마트 그리드 사이의 산업 공정 측정, 제어 및 자동화 시스템 인터페이스 상세보기