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Cleanrooms and associated controlled environments -- Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
| 분야 | ISO/TC 209 : Cleanrooms and associated controlled environments |
|---|---|
| 적용범위 | ISO 14644-2:2015 specifies minimum requirements for a monitoring plan for cleanroom or clean zone performance related to air cleanliness by particle concentration, based upon parameters that measure or affect airborne particle concentration. ISO 14644-2:2015 does not address condition monitoring of aspects such as vibration or general maintenance of the engineering systems. It does not provide for monitoring of particle populations that are outside the specified lower threshold particle-size range, 0,1 �m to 5 �m. Concentrations of ultrafine particles (particles smaller than 0,1�m) will be addressed in a separate standard. |
| 국제분류(ICS)코드 | 13.040.35 : 클린룸 및 관련 제어 환경 |
| 페이지수 | 14 |
| Edition |
| No. | 표준번호 | 표준명 | 발행일 | 상태 |
|---|---|---|---|---|
| 1 | ISO 14644-2:2015 | Cleanrooms and associated controlled environments — Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration | 2015-12-09 | 표준 |
| 2 | ISO 14644-2:2015(REDLINE) | Cleanrooms and associated controlled environments -- Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration | 2015-12-09 | 표준 |
| 3 | ISO 14644-2:2000 | Cleanrooms and associated controlled environments — Part 2: Specifications for testing and monitoring to prove continued compliance with ISO 14644-1 | 2000-09-07 | 구판 |
ISO/DIS 14644-5 - Cleanrooms and associated controlled environments — Part 5: Operations 상세보기
ISO 14644-5:2004 - Cleanrooms and associated controlled environments — Part 5: Operations 상세보기
ISO 14644-7:2004 - Cleanrooms and associated controlled environments — Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments) 상세보기
ISO 14644-6:2007 - Cleanrooms and associated controlled environments — Part 6: Vocabulary 상세보기
ISO 14644-2:2015 - Cleanrooms and associated controlled environments — Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration 상세보기
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