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Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 4: Turbomolecular vacuum pumps
| 분야 | ISO/TC 112 : Vacuum technology |
|---|---|
| 적용범위 | This document, in conjunction with ISO 21360-1, specifies methods for the measurement of performance characteristics of turbomolecular vacuum pumps. It is applicable to all sizes and all types of turbomolecular vacuum pumps, including those — with mechanical or magnetic bearings; — with or without an additional drag stage(s) or other pumping stages on the shaft; — with one or more inlet ports. Since turbomolecular vacuum pumps are backed by primary pumps, their performance cannot be completely defined by the volume flow rate curve. Also, the driving device and the backing pressure of the turbomolecular vacuum pump is important to the performance. The following completes the performance characteristics: — information about throughputs and backing pressure of the turbomolecular vacuum pump; — the compression ratio curve (compression ratio vs backing pressure of turbomolecular vacuum pump). |
| 국제분류(ICS)코드 | 23.160 : 진공공학 |
| 페이지수 | 10 |
| Edition | 1 |
| No. | 표준번호 | 표준명 | 발행일 | 상태 |
|---|---|---|---|---|
| 1 | ISO 21360-4:2018 | Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 4: Turbomolecular vacuum pumps | 2018-07-31 | 표준 |
ISO 21360-3:2019 - Vacuum technology — Standard methods for measuring vacuum pump performance — Part 3: Specific parameters for mechanical booster vacuum pumps 상세보기
ISO 21360-1:2020 - Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 1: General description 상세보기
ISO 21360-2:2020 - Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 2: Positive displacement vacuum pumps 상세보기
ISO 21360-5:2023 - Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 5: Non-evaporable getter (NEG) vacuum pumps 상세보기
ISO 21360-6:2023 - Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 6: Cryogenic vacuum pumps 상세보기
ISO 21360-2:2020 - Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 2: Positive displacement vacuum pumps 상세보기
ISO 21360-1:2020 - Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 1: General description 상세보기
ISO 21360-3:2019 - Vacuum technology — Standard methods for measuring vacuum pump performance — Part 3: Specific parameters for mechanical booster vacuum pumps 상세보기
IEC TS 63134:2020 - Active assisted living (AAL) use cases 상세보기
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