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Cleanrooms and associated controlled environments — Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration
| 분야 | ISO/TC 209 : Cleanrooms and associated controlled environments |
|---|---|
| 적용범위 | ISO 14644-15:2017 provides requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments which are linked to the ISO standard for cleanliness classes by chemical concentration (see ISO 14644‑8). The following are outside the scope of ISO 14644-15:2017: - health and safety requirements; - compatibility with cleaning agents and techniques; - cleanability; - biocontamination; - specific requirements of equipment and materials for processes and products; - design details of equipment. |
| 국제분류(ICS)코드 | 13.040.35 : 클린룸 및 관련 제어 환경 |
| 페이지수 | 21 |
| Edition | 1 |
| No. | 표준번호 | 표준명 | 발행일 | 상태 |
|---|---|---|---|---|
| 1 | ISO 14644-15:2017 | Cleanrooms and associated controlled environments — Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration | 2017-10-26 | 표준 |
ISO/DIS 14644-5 - Cleanrooms and associated controlled environments — Part 5: Operations 상세보기
ISO 14644-5:2004 - Cleanrooms and associated controlled environments — Part 5: Operations 상세보기
ISO 14644-7:2004 - Cleanrooms and associated controlled environments — Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments) 상세보기
ISO 14644-6:2007 - Cleanrooms and associated controlled environments — Part 6: Vocabulary 상세보기
ISO 14644-2:2015 - Cleanrooms and associated controlled environments — Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration 상세보기
ISO 14644-13:2017 - Cleanrooms and associated controlled environments — Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications 상세보기
ISO 14644-16:2019 - Cleanrooms and associated controlled environments — Part 16: Energy efficiency in cleanrooms and separative devices 상세보기
ISO 14644-10:2013 - Cleanrooms and associated controlled environments — Part 10: Classification of surface cleanliness by chemical concentration 상세보기
ISO 14644-14:2016 - Cleanrooms and associated controlled environments — Part 14: Assessment of suitability for use of equipment by airborne particle concentration 상세보기
ISO 14644-12:2018 - Cleanrooms and associated controlled environments — Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration 상세보기
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